2024

Ullakko Kari; Laitinen Ville; Saren Andrey; Hao Hu; Kumthekar Aditya; Norouzi Inallu Meysam

Micro magnetomechanical systems (MAMS) represent the next generation of electromechanical devices. These devices are made from adaptive materials, like magnetic shape memory alloys, that exhibit actuator and sensor functions. MAMS devices do not have separate actuators or sensors but they are integrated in the adaptive material chip. The MAMS devices can be manufactured from adaptive material wafers using lithography and etching or by additive manufacturing. In this paper, the first steps in fabricating the MAMS devices will be presented.