Data related to the ANN assisted spectral scatterometry project. The dataset contains the simulated and measured diffraction efficiencies with which the ANN was trained (A/B/C_training files). In addition there are diffraction efficiencies that are simulated using the specifications of the measured samples (v1_A/B_256.h5), the spectrum of the light source, uncertainty calculations, and the trained ANN itself (TLModel_4.13) created using Tensorflow and Keras for Python.

2024